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Analysis of Nonlinear Distortions in a Digital MEMS Microphone

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MEMS microphone’s nonlinear distortions are exploited in so-called ultrasonic dolphin attacks. The paper presents an analysis of problematic nonlinearities. For this purpose, the theoretical model was used. It allows to specify the frequencies and amplitudes of these distortions. The effectiveness of the model was illustrated by computer simulations. Then acoustic tests were carried out in a quiet anechoic chamber using a MEMS microphone. During testing, an additional reference microphone was used, which allowed to reduce the impact of non-linearity of non-MEMS test configuration components. Tests illustrate the significant level of MEMS microphone’s nonlinear distortions. Some convergence of the theoretical model with results of laboratory tests with potential development directions was also shown.

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