Novel Type of MEMS Loudspeaker Featuring Membrane-Less Two-Way Sound Generation
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F. Stoppel, F. Niekiel, T. Giese, S. Gu-Stoppel, A. Männchen, J. Nowak, D. Beer, and B. Wagner, "Novel Type of MEMS Loudspeaker Featuring Membrane-Less Two-Way Sound Generation," Paper 9874, (2017 October.). doi:
F. Stoppel, F. Niekiel, T. Giese, S. Gu-Stoppel, A. Männchen, J. Nowak, D. Beer, and B. Wagner, "Novel Type of MEMS Loudspeaker Featuring Membrane-Less Two-Way Sound Generation," Paper 9874, (2017 October.). doi:
Abstract: In this paper a novel type of piezoelectric microelectromechanical loudspeaker is presented. The device concept is based on concentrically cascaded lead zirconate titanate actuators making it the first integrated two-way MEMS speaker reported. As a further novelty, the device is designed to operate without a closed membrane significantly improving the acoustic performance, energy efficiency, and manufacturability. Extensive finite element analysis studies have revealed a very high SPL of more than 79 dB in 10 cm distance at 500 Hz for a device 1 cm² in size operated at 30 V. At higher frequencies even larger SPL values are calculated enabling a flat frequency response with 89 dB for frequencies above 800 Hz. Based on this concept first speaker prototypes have been fabricated using MEMS technology.
@article{stoppel2017novel,
author={stoppel, fabian and niekiel, florian and giese, thorsten and gu-stoppel, shanshan and männchen, andreas and nowak, johannes and beer, daniel and wagner, bernhard},
journal={journal of the audio engineering society},
title={novel type of mems loudspeaker featuring membrane-less two-way sound generation},
year={2017},
volume={},
number={},
pages={},
doi={},
month={october},}
@article{stoppel2017novel,
author={stoppel, fabian and niekiel, florian and giese, thorsten and gu-stoppel, shanshan and männchen, andreas and nowak, johannes and beer, daniel and wagner, bernhard},
journal={journal of the audio engineering society},
title={novel type of mems loudspeaker featuring membrane-less two-way sound generation},
year={2017},
volume={},
number={},
pages={},
doi={},
month={october},
abstract={in this paper a novel type of piezoelectric microelectromechanical loudspeaker is presented. the device concept is based on concentrically cascaded lead zirconate titanate actuators making it the first integrated two-way mems speaker reported. as a further novelty, the device is designed to operate without a closed membrane significantly improving the acoustic performance, energy efficiency, and manufacturability. extensive finite element analysis studies have revealed a very high spl of more than 79 db in 10 cm distance at 500 hz for a device 1 cm² in size operated at 30 v. at higher frequencies even larger spl values are calculated enabling a flat frequency response with 89 db for frequencies above 800 hz. based on this concept first speaker prototypes have been fabricated using mems technology.},}
TY - paper
TI - Novel Type of MEMS Loudspeaker Featuring Membrane-Less Two-Way Sound Generation
SP -
EP -
AU - Stoppel, Fabian
AU - Niekiel, Florian
AU - Giese, Thorsten
AU - Gu-Stoppel, Shanshan
AU - Männchen, Andreas
AU - Nowak, Johannes
AU - Beer, Daniel
AU - Wagner, Bernhard
PY - 2017
JO - Journal of the Audio Engineering Society
IS -
VO -
VL -
Y1 - October 2017
TY - paper
TI - Novel Type of MEMS Loudspeaker Featuring Membrane-Less Two-Way Sound Generation
SP -
EP -
AU - Stoppel, Fabian
AU - Niekiel, Florian
AU - Giese, Thorsten
AU - Gu-Stoppel, Shanshan
AU - Männchen, Andreas
AU - Nowak, Johannes
AU - Beer, Daniel
AU - Wagner, Bernhard
PY - 2017
JO - Journal of the Audio Engineering Society
IS -
VO -
VL -
Y1 - October 2017
AB - In this paper a novel type of piezoelectric microelectromechanical loudspeaker is presented. The device concept is based on concentrically cascaded lead zirconate titanate actuators making it the first integrated two-way MEMS speaker reported. As a further novelty, the device is designed to operate without a closed membrane significantly improving the acoustic performance, energy efficiency, and manufacturability. Extensive finite element analysis studies have revealed a very high SPL of more than 79 dB in 10 cm distance at 500 Hz for a device 1 cm² in size operated at 30 V. At higher frequencies even larger SPL values are calculated enabling a flat frequency response with 89 dB for frequencies above 800 Hz. Based on this concept first speaker prototypes have been fabricated using MEMS technology.
In this paper a novel type of piezoelectric microelectromechanical loudspeaker is presented. The device concept is based on concentrically cascaded lead zirconate titanate actuators making it the first integrated two-way MEMS speaker reported. As a further novelty, the device is designed to operate without a closed membrane significantly improving the acoustic performance, energy efficiency, and manufacturability. Extensive finite element analysis studies have revealed a very high SPL of more than 79 dB in 10 cm distance at 500 Hz for a device 1 cm² in size operated at 30 V. At higher frequencies even larger SPL values are calculated enabling a flat frequency response with 89 dB for frequencies above 800 Hz. Based on this concept first speaker prototypes have been fabricated using MEMS technology.
Authors:
Stoppel, Fabian; Niekiel, Florian; Giese, Thorsten; Gu-Stoppel, Shanshan; Männchen, Andreas; Nowak, Johannes; Beer, Daniel; Wagner, Bernhard
Affiliations:
Fraunhofer Institute for Silicon Technology ISIT, Itzehoe, Germany; Fraunhofer Institute for Digital Media Technology IDMT, Ilmenau, Germany(See document for exact affiliation information.)
AES Convention:
143 (October 2017)
Paper Number:
9874
Publication Date:
October 8, 2017Import into BibTeX
Subject:
Transducers
Permalink:
http://www.aes.org/e-lib/browse.cfm?elib=19271