Parametric Array loudspeakers can generate a sound beam using nonlinear acoustic interactions, widely known as “Parametric Array,” that can enable private listening in a public area. Parametric array loudspeakers can be applied to many applications, such as information technology devices, that require a high power efficiency and wide bandwidth. In a previous study, a piezoelectric micro-machined ultrasonic transducer (PMUT) is shown to be an efficient unit for a parametric array loudspeaker. In this paper we will describe realization of a parametric array loudspeaker with high power efficiency (up to 71%) and wide flat radiation bandwidth (19.5 kHz, difference frequency wave with equalization), which consists of an array of PMUTs with two resonance frequencies (f1 = 100 kHz, f2 = 110 kHz) and use of “out-of-phase” driving techniques.
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