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Membrane Modes in Transducers with the Direct D/A Conversion

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Operating principle of systems with the direct acoustic D/A conversion, which are sometimes called digital loudspeakers, brings new features to the field of transducer design. There are many design possibilities to these systems, using different transduction principles and spatial arrangement of constituting parts. This paper deals with the single-acting condenser transducer, suitable for micromachining applications, in which the membrane is driven by a partitioned back electrode. While in conventional transducers the electric force between the back electrode and the membrane is evenly distributed, in digital transducers it is no longer the case. Consequences to membrane vibrations for some cases of excitation by various distributions of forces representing given binary combinations from the dynamic level are presented.

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