Characteristics of integrated microphones are easily set by a correct model. The behavior of flow in the gap or through the backplate is studied by the Navier-Stokes, the continuity, and state equations. Linearizing these equations leads to a system that controls the flow into microscopic acoustical structures. Analytical solutions for simple geometries appearing in the realization of an integrated microphone on silicon are given.
(See document for exact affiliation information.)
Click to purchase paper as a non-member or login as an AES member. If your company or school subscribes to the E-Library then switch to the institutional version. If you are not an AES member Join the AES. If you need to check your member status, login to the Member Portal.
