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Analysis of Current MEMS Microphones for Cost-Effective Microphone Arrays—A Practical Approach

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With this paper we present a practically relevant investigation of current, commercially available MEMS microphones (Micro-ElectroMechanical Systems). We compared the static noise floor exhibited by single and various parallel MEMS microphone configurations and a conventional and commonly used electret capsule, as well as the directivity patterns of selected configurations. The results suggest that while current types are exhibiting an already acceptable static noise floor, a direct parallel circuit of MEMS microphones allows further reductions of the noise floor close to the theoretical value of 3 dB SPL per doubling of number of microphones while maintaining omnidirectionality below 5 kHz.

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