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HE. G.. Schenk, L. Ehrig, F. Wall, B. Kaiser, M. Stolz, S. Langa, D. Schuffenhauer, JO. MA. Monsalve Guaracao, A. Melnikov, and H. Conrad, "Balanced Electrostatic All-Silicon MEMS Speakers," Paper 10414, (2020 October.). doi: HE. G.. Schenk, L. Ehrig, F. Wall, B. Kaiser, M. Stolz, S. Langa, D. Schuffenhauer, JO. MA. Monsalve Guaracao, A. Melnikov, and H. Conrad, "Balanced Electrostatic All-Silicon MEMS Speakers," Paper 10414, (2020 October.). doi:
Abstract: MEMS based audio reproduction systems have recently become a vibrant field of research and development. Benchmarks for size, power consumption and cost efficiency are very demanding. Electrostatic MEMS actuators offer a high potential to meet both, commercial and technical targets. Macroscopic electrostatic headsets are among the best that audio markets offer today. Using MEMS technology, power consumption and voltage requirements are reduced to the needs of portable devices. In this contribution we report for the first time a balanced MEMS µSpeaker, using two antagonistic electrostatic forces, improving electromechanical stability and harmonic distortion. The distinction to state-of-the-art MEMS push-pull actuators and the acoustic performance is presented.

@article{schenk2020balanced,
author={schenk, hermann a. g. and ehrig, lutz and wall, franziska and kaiser, bert and stolz, michael and langa, sergiu and schuffenhauer, david and monsalve guaracao, jorge mario and melnikov, anton and conrad, holger},
journal={journal of the audio engineering society},
title={balanced electrostatic all-silicon mems speakers},
year={2020},
volume={},
number={},
pages={},
doi={},
month={october},} @article{schenk2020balanced,
author={schenk, hermann a. g. and ehrig, lutz and wall, franziska and kaiser, bert and stolz, michael and langa, sergiu and schuffenhauer, david and monsalve guaracao, jorge mario and melnikov, anton and conrad, holger},
journal={journal of the audio engineering society},
title={balanced electrostatic all-silicon mems speakers},
year={2020},
volume={},
number={},
pages={},
doi={},
month={october},
abstract={mems based audio reproduction systems have recently become a vibrant field of research and development. benchmarks for size, power consumption and cost efficiency are very demanding. electrostatic mems actuators offer a high potential to meet both, commercial and technical targets. macroscopic electrostatic headsets are among the best that audio markets offer today. using mems technology, power consumption and voltage requirements are reduced to the needs of portable devices. in this contribution we report for the first time a balanced mems µspeaker, using two antagonistic electrostatic forces, improving electromechanical stability and harmonic distortion. the distinction to state-of-the-art mems push-pull actuators and the acoustic performance is presented.},}

TY - paper
TI - Balanced Electrostatic All-Silicon MEMS Speakers
SP - EP -
AU - Schenk, Hermann A. G.
AU - Ehrig, Lutz
AU - Wall, Franziska
AU - Kaiser, Bert
AU - Stolz, Michael
AU - Langa, Sergiu
AU - Schuffenhauer, David
AU - Monsalve Guaracao, Jorge Mario
AU - Melnikov, Anton
AU - Conrad, Holger
PY - 2020
JO - Journal of the Audio Engineering Society
IS -
VO -
VL -
Y1 - October 2020 TY - paper
TI - Balanced Electrostatic All-Silicon MEMS Speakers
SP - EP -
AU - Schenk, Hermann A. G.
AU - Ehrig, Lutz
AU - Wall, Franziska
AU - Kaiser, Bert
AU - Stolz, Michael
AU - Langa, Sergiu
AU - Schuffenhauer, David
AU - Monsalve Guaracao, Jorge Mario
AU - Melnikov, Anton
AU - Conrad, Holger
PY - 2020
JO - Journal of the Audio Engineering Society
IS -
VO -
VL -
Y1 - October 2020
AB - MEMS based audio reproduction systems have recently become a vibrant field of research and development. Benchmarks for size, power consumption and cost efficiency are very demanding. Electrostatic MEMS actuators offer a high potential to meet both, commercial and technical targets. Macroscopic electrostatic headsets are among the best that audio markets offer today. Using MEMS technology, power consumption and voltage requirements are reduced to the needs of portable devices. In this contribution we report for the first time a balanced MEMS µSpeaker, using two antagonistic electrostatic forces, improving electromechanical stability and harmonic distortion. The distinction to state-of-the-art MEMS push-pull actuators and the acoustic performance is presented.