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Miniature Microphone Using an Integrated Piezoresistive Pressure Transducer

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An experimental pressure microphone has been constructed utilizing a chip from an integrated-circuit pressure transducer. The frequency response is uniform from 20 to 20 000 Hz. The microphone has been successfully used for real-ear testing of stereophones, where it is placed under the ear cap. The balanced low-impedance output of the transducer potentially affords good electromagnetic-interference (EMI) rejection. Pressure gradient configurations are realizable. At present low electroacoustic sensitivity limits potential audio applications of the transducer to high-level sound pickup, including close-talking microphone or musical instrument sound pickups. Further research could result in broader applications.

JAES Volume 28 Issue 6 pp. 433-436; June 1980
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