A study of a miniature capacitor microphone compared three results: simulation based on physical parameters in an equivalent circuit model, measurements made in an anechoic chamber, and the manufacturer’s data sheets. The simulation was in good agreement with measurements and published data. The circuit model was also used in a parametric study to explore parameter sensitivity. Investigations included microphone stiffness, cover opening diameter, as well as the thickness of the annular ring, diaphragm, air gap, backplate, and holder.
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